Godyak V.A. Soviet radio frequency discharge research

Delphic Associates, 1986. — 187 p. — ISBN 1558310126, 9781558310124.The present monograph is principally a summary of the author's and his group's published theoretical and experimental work on RF capacitive discharges. It is written in a style frequently found in Soviet technical. papers and often misunderstood by Western readers. As described in the first chapter, Soviet research is, as a rule, conducted in small, closely-knit, compartmentalized groups specializing in narrow disciplines. In unclassified fields, their publications are directed toward other groups working in the same discipline. Consequently, many assumptions are implicit in the formulas. Likewise, many derivations are left to the reader. Another reason for this style seems to be professional competition within an hierarchical social structure which rewards reputation within a narrow discipline and loyalty to one's own group rather than broad recognition, such as required in the United States.Survey of rf discharge plasma research
Radio Frequency (RF) Discharge and its Applications in Science and Technology
The Organization of Research on Low-Temperature Plasma
Select Features of Soviet Science with Specific Reference to Low-Temperature Plasmas
Soviet Research on RF DischargesThe phenomenology of RF discharges
General
The Parameters of RF Discharges
RF Breakdown and the Steady-State of RF Discharges
The Concept of a Direct Current Analogy
Electrode ProcessesSteady state rf discharge theory (the homogeneous plasma model)
Formulation of the Problem
RF Discharge Impedance
The Ionization and Energy Balance of RF Discharges
The Electrode RF Sheath
The RF Discharge Parameters
The Collisionles Dissipation of RF Field Energy in RF Discharges
EndnotesThe inhomogeneous plasma model (theory and experimentation)
Fundamental Relations for RF Discharge Parameters
Experimental Results
Electron Temperature
The Current-Voltage Characteristic and Plasma Density
Resonant RF Discharges
The Effective Electron Collision Frequency
A Comparison of Theory and Experiment
EndnotesSpatial distribution of rf discharge plasmas
General
A Simplified Model of Bonded Plasmas
The Low Pressure Case (A Local Ionization Model)
The High Pressure Case
A Comparison to Experimental Results
EndnotesThe electrode sheaths in rf discharges
General
Formulation of the Problem
The Collisionless Electrode Sheath
The Collisional Electrode Sheath
Assymetrical RF Discharges and Nonlinear EffectsEndnotesThe probe diagnostics of rf plasmas
Distortions in the Probe Characteristics
Proper Probe Diagnostic Methods for RF Discharge Plasmas
The Influence of RF Voltage on the Measurement of the electron energy
The Effect of the Finite Width of the Probe sheaths
An Experimental Investigation of the Electron Energy Distribution Function in RF Discharges
EndnotesRf discharges in secondary electron emission conditions: the y -mode
General
The y -Process in the Electrode RF Sheath
The Ionization Balance
The Parameters of RF Discharges in the f -Mode
Experimental Results
The Various RF Discharge Modes
Endnotes