Jackson K.A., Schroter W. (Eds.) Handbook of Semiconductor Technology: Processing of Semiconductors. Volume 2

Wiley, 2000. — 703 p. — ISBN: 3-527-29835-5.The two volumes of this Handbook describe the underlying scientific and technological bases of this unique development, with the first addressing the science, and the second the technological framework of the field. Written by experts who have made major contributions to this enterprise, the chapters span from defect physics to device processing to present a panorama of the key steps, models, and visions -in short the evolution - of microelectronics. At the same time, this Handbook can be seen as a carefully written status report, specially valuable to those engaged in the continuing interplay between semiconductor science, technology, and business, and in the creation of new markets, such as sensor arrays, power and high frequency devices, solar cells, and blue lasers. Circuit and systems design, which turn science and technology into end-user products, are not included as separate chapters, because each would need a volume in its own right. However, due to their close connection with process science and technology, they are briefly treated as the need arises.
In this self-contained handbook deals on the enabling materials technology for the electronics industry world-renowned authors treat the processing of semiconductors and related technologies.Silicon Processing
Compound Semiconductor Processing
Epitaxial Growth
Photolithography
Selective Doping
Etching Processes in SemiconductorManufacturing
Silicon Device Structures
Compound Semiconductor Device Structures
Silicon Device Processing
Compound Semiconductor Device Processing
Integrated Circuit Packaging
Interconnection Systems.
Of interest to physicists and engineers in research and in the electronics industry, this is a valuable reference source and state-of-the-art review by the world's top authors.