Xiao Hong. Introduction to Semiconductor Manufacturing Technology

2nd Edition. — SPIE Press, 2012. — 686 p. — ISBN: 978-0-8194-9092-6.IC chip manufacturing processes, such as photolithography, etch, CVD, PVD, CMP, ion implantation, RTP, inspection, and metrology, are complex methods that draw upon many disciplines. Introduction to Semiconductor Manufacturing Technologies, Second Edition thoroughly describes the complicated processes with minimal mathematics, chemistry, and physics; it covers advanced concepts while keeping the contents accessible to readers without advanced degrees. Designed as a textbook for college students, this book provides a realistic picture of the semiconductor industry and an in-depth discussion of IC chip fabrication technology. The text focuses on current fabrication technologies, but older technologies are discussed for historical context.Introduction to Integrated Circuit Fabrication
Semiconductor Basics
Wafer Manufacturing, Epitaxy, and Substrate Engineering
Thermal Processes
Photolithography
Plasma Basics
Ion Implantation
Etch
Chemical Vapor Deposition and Dielectric Thin Films
Metallization
Chemical Mechanical Polishing
Process Integration
Integrated Circuit Processing Technologies
Future Trends and Summary.