Chen W.-K. (Ed.) VLSI Technology

CRC Press, 2003. — 387 p. — ISBN: 0-8493-1738-X.The purpose of VLSI Technology is to provide, in a single volume, a comprehensive reference work covering the broad spectrum of VLSI processes, semiconductor technology, micromachining, microelectronics packaging, compound semiconductor digital integrated circuit technology, and multichip module technologies. The book has been written and developed for practicing electrical engineers in industry, government, and academia. The goal is to provide the most up-to-date information in the field.
Over the years, the fundamentals of the field have evolved to include a wide range of topics and a broad range of practice. To encompass such a wide range of knowledge, the book focuses on the key concepts, models, and equations that enable the design engineer to analyze, design, and predict the behavior of large-scale systems. While design formulas and tables are listed, emphasis is placed on the key concepts and the theories underlying the processes.
The book stresses fundamental theory behind professional applications. In order to do so, the text is reinforced with frequent examples. Extensive development of theory and details of proofs have been omitted. The reader is assumed to have a certain degree of sophistication and experience. However, brief reviews of theories, principles, and mathematics of some subject areas are given.VLSI Technology: A System Perspective
CMOS/BiCMOS Technology
Bipolar Technology
Silicon on Insulator Technology
SiGe Technology
SiC Technology
Passive Components
Power IC Technologies
Noise in VLSI Technologies
Micromachining
Microelectronics Packaging
Multichip Module Technologies
Channel Hot Electron Degradation-Delay in MOS Transistors Due to Deuterium Anneal
Materials
Compound Semiconductor Devices for Digital Circuits
Logic Design Principles and Examples
Logic Design Examples.