The Institution of Engineering and Technology, 2007. — 457 p. — ISBN: 978-0-86341-743-6.
The first book to deal with a broad spectrum of process and device design, and modelling issues related to semiconductor devices, bridging the gap between device modelling and process design using TCAD. Presents a comprehensive perspective of emerging fields and covers topics ranging from materials to fabrication, devices, modelling and applications. Aimed at research-and-development engineers and scientists involved in microelectronics technology and device design via Technology CAD, and TCAD engineers and developers.
IC technology and TCAD tools
Diffusion and oxidation of SiGe/SiGeC films
Strain-engineered MOSFETs
SOI MOSFETs
Heterostructure bipolar transistors
SiGe/SiGeC HBT technology
MOSFET: compact models
HBT: compact models
Design and simulation of high-speed devices
Passive components