Senturia S.D. Microsystem Design

Kluwer Academic Publishers, 2001. — 689 p. — ISBN: 0-306-47601-0.Microsystem design now cuts across most disciplines in engineering and is the focus for courses, and degree programs, at many major universities. These courses, which must be open to individuals with a wide range of backgrounds, need material covering an equally wide range of subjects in a coherent, unified way. This book will be a major help in meeting these challenges.
The author has been a principal figure guiding the development of microsystems for more than two decades, through both his research contributions and his leadership of the conferences and journals that have defined the field. The book itself iscomprehensive, a friendly tutor for those just entering the field and a resource for long-time practitioners. It is all here — the technology, the modeling, the analysis methods, and the structures. The important principles of materials, mechanics, and fluidics are here so that the designer can understand and predict these aspects of advanced structures. And the electronics is here so that he or she can also understand the signal readout and processing challenges and the use of on-chip feedback control. Noise is covered so that the basic limitations to accuracy and resolution can likewise be anticipated. Finally, case studies tie everything together, highlighting important devices of current interest.Getting Started.An Approach to MEMS Design.
Microfabrication.
Process Integation.
Modeling Strategies.
Lumped Modeling with Circuit Elements.
Energy-conserving Transducers.
Lumped-element System Dynamics.
Domain-Specific Details.
Elasticity.
Structures.
Dissipation and the Thermal Energy Domain.
Lumped Modeling of Dissipative Processes.
Fluids.
Circuit and System Issues.
Electronics.
Feedback Systems.
Noise.
Case Studies.
Packaging.
A Piezoresistive Pressure Sensor.
A Capacitive Accelerometer.
Electrostatic Projection Displays.
A Piezoelectric Rate Gyroscope.
Microsystems for DNA Amplification.
A Microbridge Combustible-gas Sensor.
Appendices.