Taurus-TSUPREM-4 User Guide. Synopsys

Version V-2003.12 — 852 p.This manual includes details for using TSUPREM-4 and covers all aspects of the
TSUPREM-4 2D process simulation program.Describes the enhancements and bug fixes.
Includes conventions, related publications, and customer support information.
Gives an overview of the program.
Discusses the execution of TSUPREM-4, the required input files, the output files generated, and other files required to run the program.
Describes the physical models for the physical processes simulated by TSUPREM-4 and discusses some of the numerical methods used during the simulation.
Contains detailed descriptions of the input statements recognized by TSUPREM-4. The description of each statement includes a summary of the statement syntax, descriptions of the statement parameters, and a discussion of the use of the statement, with examples.
Presents simple examples illustrating the use of the program.
Presents more complicated examples illustrating the use of the program for simulating complete processes.
Describes the USEIT Option, Physical Model, and Equation Interface language, and details examples.
Lists the default simulation coefficient values and the literature references from which they were derived.
Describes the plot device definition file s4pcap. This file contains information that describes the available graphical output devices.
Describes the data format used by mask data files.
Describes the data formats files created with the SAVEFILE statement.
Contains a detailed description of the interface to the MINIMOS 5 device simulation program.