Cale T.S., Pintchovski F.S. Advanced Metallization for ULSI Applications 1992

Pittsburgh, Pennsilvania: Materials Research Society, 1993. - 379 pp.Proceedings of the Conference ((Ninth Workshop on Adavanced Metallization) held October 20-22, 1992 in Tempe, Arizona.
Hot topics include tungsten metallization, "hot" aluminum and copper metallization, titanium nitride barriers and silicides.
The program included also the seccion on the reliability of metallization.