Yoshizawa T. (ed.) Handbook of Optical Metrology. Principles and Applications

Boca Raton: CRC Press, 2009. — 728 p. — ISBN: 978-0-84933-760-4.Carefully designed to make information accessible to beginners without sacrificing academic rigor, the Handbook of Optical Metrology: Principles and Applications discusses fundamental principles and techniques before exploring practical applications.
With contributions from veterans in the field, as well as from up-and-coming researchers, the Handbook offers 30 substantial and well-referenced chapters. In addition to the introductory matter, forward-thinking descriptions are included in every chapter that make this a valuable reference for all those involved with optical metrology.Fundamentals of Optical Elements and DevicesLight Sources
Natalia DushkinaLenses, Prisms, and Mirrors
Peter R. HallOptoelectronic Sensors
Motohiro SuyamaOptical Devices and Optomechanical Elements
Akihiko Chaki and Kenji MagaraFundamentals of Principles and Techniques for MetrologyChapter Propagation of Light
Natalia DushkinaInterferometry
David A. PageHolography
Giancarlo PedriniSpeckle Methods and Applications
Nandigana Krishna MohanMoire Metrology
Lianhua JinChapter Optical Heterodyne Measurement Method
Masao HiranoDiffraction
Toru YoshizawaLight Scattering
Lev T. PerelmanPolarization
Michael ShribakNear-Field Optics
Wenhao Huang, Xi Li, and Guoyong ZhangLength and Size
Rene SchodelPractical ApplicationsDisplacement
Akiko Hirai, Mariko Kajima, and Souichi TeladaStraightness and Alignment
Ruedi ThalmannFlatness
Toshiyuki Takatsuji and Youichi BitouSurface Profi lometry
Toru Yoshizawa and Toshitaka WakayamaThree-Dimensional Shape Measurement
Frank Chen, Gordon M. Brown, and Mumin SongFringe Analysis
Jun-ichi KatoPhotogrammetry
Nobuo KochiOptical Methods in Solid Mechanics
Anand AsundiOptical Methods in Flow Measurement
Sang Joon LeePolarimetry
Baoliang WangBirefringence Measurement
Yukitoshi OtaniChapter Ellipsometry
Hiroyuki FujiwaraOptical Thin Film and Coatings
Cheng-Chung Lee and Shigetaro OguraFilm Surface and Thickness Profi lometry
Katsuichi KitagawaOn-Machine Measurements
Takashi Nomura and Kazuhide Kamiya