Lang J.H. (ed.) Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines

Springer Science+Business Media, LLC, 2010, XIV, 454p. 604 illus., 302 illus. in color. — ISBN: 978-0-387-77746-7, e-ISBN: 978-0-387-77747-4, DOI 10.1007/978-0-387-77747-4.Describes how turbine generators, motor compressors, rocket motors and combustors have been used as energy sources at the MEMS scale.
Discusses in great detail how to model and manage systems-level trade-offs in complex MEMS devices using the gas turbine engine, and in particular its motor compressors and turbine generators.
Provides a detailed discussion of the critical integration and design decisions that must take place when building a power supply at the MEMs scale.
Contributing authors are mostly at MIT.
Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines is an outgrowth of the MIT Micro Engine Project. This project began at the Massachusetts Institute of Technology in the Fall of 1995, and later expanded through collaborations with the Georgia Institute of Technology, the Clark Atlanta University, and the University of Maryland at College Park.
The overall objective of the Micro Engine Project was to develop a small but power-dense gas turbine generator based on MEMS fabrication technologies. Thus, the project sought to develop a fuel-burning jet engine that would drive an electric generator to produce electric power for general purpose use. Along the way, the project would advance the science and engineering of many disciplines from the MEMS perspective.
The Micro Engine Project was by its very nature a highly mult-disciplinary project pursuing advances in materials, structures, fabrication, combustion, heat transfer, turbomachinery, bearings and electromechanics, all at the MEMS scale. Many of these topics are addressed in this volume, including:
materials structures and packaging.
multi-wafer MEMS fabrication and and bonding technologiesElectroplating magnetic components.
electroplating magnetic structures into silicon.
very-high-speed air bearings.
thermofluids and turbomachinery.
electric and magnetic generators.
combustion.
About The MEMs Reference Shelf:
"The MEMs Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMs) which combine mechanical, electrical, optical, or fluidic elements on a common microfabricated substrate to create sensors, actuators, and microsystems. The series, authored by leading MEMs practitioners, strives to provide a framework where basic principles, known methodologies and new applications are integrated in a coherent and consistent manner.".
Stephen D. Senturia.
Massachusetts Institute of Technology, Professor of Electrical Engineering, Emeritus.
Content Level » Research.
Keywords » MIT gas turbine engine - gas-turbine engine - integrated electric generator -materials selection - microengine fabrication - microfabrication technologies - multi-wafer silicon process - power MEMS device.
Related subjects » Circuits & Systems - Electronics & Electrical Engineering - Energy - Energy Technology.Introduction to Power MEMS.
System design considerations and device overview.
Materials, structures, and packaging.
Microengine fabrication.
Fabrication of microscale rotating magnetic machines.
High-speed gas bearings for micro-turbomachinery.
Thermofluids and turbomachinery.
Motors and generators.
Microcombustors for rotating machinery.