Liu Ai-Qun (et al.). Photonic MEMS Devices: Design, Fabrication and Control

CRC Press, 2009. — 504 p.Photonic micro-electro-mechanical systems (MEMS) is a significant branch of MEMS technology that originated from optical MEMS technology. Its wide potential is very closely related to photonics applied in different research fields such as photonic bandgap crystals, plasmonics, biophotonics, etc.Photonic MEMS devices may be passive or active devices spinning from single devices to large integrated MEMS systems with electronic control circuits. Photonic MEMS covers a broad spectrum of applications ranging from fiber optical communication to optofluidic or micro-optical-fluidic-systems (MOFS) for biomedical applications.The purpose of this book is to collect, edit, and summarize different aspects of photonic MEMS research, providing as much background and foundational information as possible on the essential theories for the analysis and design of the photonic MEMS devices.Subjects covered in the book:MEMS Optical Switches and Systems
Design of MEMS Optical Switches
MEMS Thermo-Optic Switches
PHC Microresonators Dynamic Modulation Devices
MEMS Variable Optical Attenuators
MEMS Discretely Tunable Lasers
MEMS Continuously Tunable Lasers
MEMS Injection-Locked Lasers
Deep Etching Fabrication Process
Deep Submicron Photonic Bandgap Crystal Fabrication Processes
Control Strategies for Electrostatic MEMS Devices
Control of Optical Devices