Lyshevski S.E. Nano-and Micro-electromechanical Systems: Fundamentals of Nano - and Microengineering

CRC Press, 2001. — 345 p.This book is designed for a one-semester course on Nano- and Microelectromechanical Systems or Nano- and Microengineering. A typical background needed includes calculus, electromagnetics, and physics. The purpose of this book is to bring together in one place the various methods, techniques, and technologies that students and engineers need in solving a wide array of engineering problems in formulation, modeling, analysis, design, and optimization of high-performance microelectromechanical and nanoelectromechanical systems (MEMS and NEMS). This book is not intended to cover fabrication aspects and technologies because a great number of books are available. At the same time, extremely important issues in analysis, design, modeling, optimization, and simulation of NEMS and MEMS have not been comprehensively covered in the existing literature.Nanotechnology and Microtechnology (Nano- and Micro- Science, Engineering and Technology), and Beyond
Nano- and Microscale Systems, Devices, and Structures
Nano- and Microsystems: Classification and Consideration
Fundamentals of Microfabrication and MEMS Fabrication Technologies
Devising and Synthesis of NEMS and MEMS
Modeling of Micro- and Nanoscale Electromechanical Systems and Devices
Quantum Mechanics and its Applications
Molecular and Carbon Nanoelectronics
Control of MEMS and NEMS
Examples in Synthesis, Analysis, Design and Fabrication of MEMS